Previous | Next | Zeiss
Topic: Zeiss Reliability
Conf: Zeiss, Msg: 1950
From: Douglas Frost (doug.frost@kla-tencor.com)
Date: 6/12/2000 12:30 PM

We've had basically all the same problems you have listed. Overall the system is very expensive to maintain and operate. We thought at first that a third operator was the source of our problems but I guess this is to be expected with a delicate piece of high tech equipment. The only real issue I have come across is the fact that during scanning it is possible to gather data while the probe is not in contact with a surface. I called this "scanning air" in the Zeiss "cmm forum" which is no longer on their website. They seemed to be upset that I brought it up and offered no practical solutions other than in future models it may be corrected. I now spend a lot more time on my programming and program runs to verify this isn't happening. I also write or rewrite programs to do single point contact programming (since I have never experienced this problem that way) when I need to be absolutely sure that contact is made. Maybe in the future.....