Lai,
Mitutoyo has its own SPC software for CMM's it is called STATMeasure it is from the Measure Link group of Mitutoyo. They have a website it is www.measurlink.com. They should be able to answer any questions you have.
GEOMeasure does out put to Excel and any database software if you want to import to your own SPC calculations. Simply select the desired method under the "save as" selection in the Output window as stated in the previous message.