To the best of my knowledge there is no way to perform a parameter driven scan with Silma on a Zeiss CMM. The CMM will follow along nominal points if you don't use "GOTO" moves between probings. Make sure that the first probing in a new direction has (1) "GOTO" in the normal direction. Visit my web page for more support.

Good Luck,
Tom Zitzelberger
Western Metrology
http://www.westernmetrology.com